ERIC Number: EJ995700
Record Type: Journal
Publication Date: 2012-Nov
Pages: 8
Abstractor: As Provided
ISBN: N/A
ISSN: ISSN-0018-9359
EISSN: N/A
A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts
Jalali, M.; Marti, J. J.; Kirchhoff, A. L.; Lawrenz, F.; Campbell, S. A.
IEEE Transactions on Education, v55 n4 p517-524 Nov 2012
A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools. (Contains 5 figures and 3 tables.)
Descriptors: Technology Education, Research Tools, Concept Teaching, Scientific Concepts, Hands on Science, Cost Effectiveness, Research Projects, Photography, Program Descriptions, Learning Modules, Laboratory Experiments, Laboratory Procedures, Optics, Laboratory Equipment, Engineering Technology, Intellectual History, Reprography, Printing
Institute of Electrical and Electronics Engineers, Inc. 445 Hoes Lane, Piscataway, NJ 08854. Tel: 732-981-0060; Web site: http://bibliotheek.ehb.be:2578/xpl/RecentIssue.jsp?punumber=13
Publication Type: Journal Articles; Reports - Descriptive
Education Level: Higher Education; Secondary Education
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A
Grant or Contract Numbers: N/A