The study of students' willingness to use translation technology can motivate students to use the translation technology and improve their translation efficiency. This paper reports on a survey which collected 716 valid questionnaires from students in the Master-level Program in Translation and Interpreting. Structural equation modeling (SEM) was used to assess the influence of six potential variables on Master of Translation and interpreting (MTI) usage intention. The results show that perceived usefulness (PU), perceived ease of use (PEOU), subjective norm (SN) and translation technology self-efficacy (TTSE) have a significant positive influence on usage intention (UI), and perceived ease of use and perceived usefulness have significant mediating effects. Additionally, self-efficacy has a marginal or no influence at all on perceived usefulness, and flow experience (FE) has no effect on usage intention. Suggestions for future studies in the area of translation technology teaching are proposed based on the results and limitations of this study. These findings contribute to the promotion of the use of translation technology by master of Translation and interpreting at universities, which is expected to provide a beneficial research foundation for the teaching of translation technology.