Describes a course, taught jointly by electrical/chemical engineering departments at the Massachusetts Institute of Technology, designed to teach the fundamental science of plasma processing as well as to give an overview of the present state of industrial processes. Provides rationale for course development, texts used, class composition, and…

Presents a synopsis of four lectures given in an elective senior-level electronic material processing course to introduce solid state electronics. Provides comparisons of a large scale chemical processing plant and an integrated circuit. (YP)

Discusses chemical vapor deposition epitaxy on patternless and patterned substrates for an electronic materials processing course. Describes the processs types and features of epitaxy. Presents some potential problems of epitaxy. Lists 38 references. (YP)

Presents a model for silicon oxidation in the manufacture of silicon devices and integrated circuits. Provides homework problems and their solutions. (YP)

Describes a 15-week course in the fundamentals of microelectronics processing in chemical engineering, which emphasizes the use of very large scale integration (VLSI). Provides a listing of the topics covered in the course outline, along with a sample of some of the final projects done by students. (TW)