The challenge of learning science during the COVID-19 pandemic in elementary schools focuses on the need for digital learning materials for Science Process Skills (SPS) through the perspective of science as an investigation process. This study aims to investigate the influence of interactive digital worksheets based on level of inquiry towards science process skills during the covid-19 pandemic in elementary school. In the study a quasi-experimental research design with pretest-posttest control groups was adopted. The participants were composed of 124 fifth grade elementary school students. The data were collected via the SPS test through measurement indicators of observation, classifying, communication, measuring, inference, and prediction aspects. The obtained data were analyzed using independent sample t-test after going through the assumption test of normality, homogeneity and balance. The results of calculating the hypothesis test obtained p = 0.000 at a significance level of 5% indicating that there is a difference between IDW and student SPS. The effect size test was obtained by a percentage of 66.18% so that it can be concluded that the use of IDW based on LoI can effectively increase SPS in elementary school students. Interactive facilities and ease of access as well as the suitability of work stages based on the LoI contribute to student independence and stimulate student SPS in elementary schools during learning during the pandemic.