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Direct linkHsu, Keng Hao – ProQuest LLC, 2009
Through this work a new all-solid, ambient processing condition direct metal patterning technique has been developed and characterized. This ionic-transport-based patterning technique is capable of sub-50nm feature resolution under ambient conditions. It generates features with a rate that is comparable to conventional dry-etching techniques. A…
Descriptors: Engineering, Manufacturing, Patternmaking, Metal Working
