Scope:This International Standard provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities throug...Show More
Metadata
Scope:
This International Standard provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way. This International Standard provides steps employed to facilitate the introduction of nanomaterials into the semiconductor manufacturing facilities. This sequence is described below under the areas of raw materials acquisition, materials processing, design, IC fabrication, testing, and end-use. These activities represent the major stages of the supply chain in semiconductor manufacturing facilities.
Date of Publication: 30 September 2015
Electronic ISBN:978-0-7381-9997-9
Persistent Link: https://ieeexplore.ieee.org/servlet/opac?punumber=7407263
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Use Of Materials ,
- International Standards ,
- Normal Reference ,
- Licensing Agreements ,
- International Electrotechnical Commission ,
- Terms Of This License ,
- Patent Rights ,
- Patent Claims ,
- Nanoparticles ,
- Raw Materials ,
- Polydispersity Index ,
- Fabrication Process ,
- Nanosheets ,
- Nanowires ,
- Surface Functionalization ,
- Material Processing ,
- Gas Concentration ,
- Gas Temperature ,
- Waste Streams ,
- Choice Of Substrate ,
- External Dimensions ,
- Carbon Nanotubes ,
- Nanoelectronics
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Use Of Materials ,
- International Standards ,
- Normal Reference ,
- Licensing Agreements ,
- International Electrotechnical Commission ,
- Terms Of This License ,
- Patent Rights ,
- Patent Claims ,
- Nanoparticles ,
- Raw Materials ,
- Polydispersity Index ,
- Fabrication Process ,
- Nanosheets ,
- Nanowires ,
- Surface Functionalization ,
- Material Processing ,
- Gas Concentration ,
- Gas Temperature ,
- Waste Streams ,
- Choice Of Substrate ,
- External Dimensions ,
- Carbon Nanotubes ,
- Nanoelectronics