Abstract:
A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics t...Show MoreMetadata
Abstract:
A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools.
Published in: IEEE Transactions on Education ( Volume: 55, Issue: 4, November 2012)
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, USA
Maryam Jalali received the M.S. degree in electrical engineering from the University of Minnesota, Minneapolis, in 2009, and is currently pursuing the Ph.D. degree in electrical and computer engineering from the same institution.
Her current research interests include study of deposition of carbon nanotubes and fabrication of resistively heated emitter pixels.
Maryam Jalali received the M.S. degree in electrical engineering from the University of Minnesota, Minneapolis, in 2009, and is currently pursuing the Ph.D. degree in electrical and computer engineering from the same institution.
Her current research interests include study of deposition of carbon nanotubes and fabrication of resistively heated emitter pixels.View more
Nanofabrication Center, University of Minnesota, Minneapolis, MN, USA
James J. Marti received the Bachelor's degree in physics and biology from Macalester College, St. Paul, MN, in 1980, the M.S. degree in atmospheric science from the University of Arizona, Tucson, in 1988, and the Ph.D. degree in physics from the University of Minnesota, Minneapolis, in 1993.
He is currently the External Relations Coordinator with the Nanofabrication Center, University of Minnesota, where he develops and pr...Show More
James J. Marti received the Bachelor's degree in physics and biology from Macalester College, St. Paul, MN, in 1980, the M.S. degree in atmospheric science from the University of Arizona, Tucson, in 1988, and the Ph.D. degree in physics from the University of Minnesota, Minneapolis, in 1993.
He is currently the External Relations Coordinator with the Nanofabrication Center, University of Minnesota, where he develops and pr...View more
Department of Educational Psychology, University of Minnesota, Minneapolis, MN, USA
Allison L. Kirchhoff received the Ph.D. degree in curriculum and instruction from the University of Minnesota, Minneapolis, in 2009.
She is currently an independent Evaluation Consultant in Minneapolis, MN.
Dr. Kirchhoff is a member of the School Science and Mathematics Association and the American Evaluation Association.
Allison L. Kirchhoff received the Ph.D. degree in curriculum and instruction from the University of Minnesota, Minneapolis, in 2009.
She is currently an independent Evaluation Consultant in Minneapolis, MN.
Dr. Kirchhoff is a member of the School Science and Mathematics Association and the American Evaluation Association.View more
Department of Educational Psychology, University of Minnesota, Minneapolis, MN, USA
Frances Lawrenz received the Dr.Phil. degree with a major in education and minors in chemistry and mathematics from the University of Minnesota, Minneapolis, in 1974.
She is currently the Associate Vice President for Research with the University of Minnesota, Minneapolis, where she is also a Professor with the Department of Educational Psychology. Her specialization is STEM program evaluation.
Dr. Lawrenz is a member of AEA...Show More
Frances Lawrenz received the Dr.Phil. degree with a major in education and minors in chemistry and mathematics from the University of Minnesota, Minneapolis, in 1974.
She is currently the Associate Vice President for Research with the University of Minnesota, Minneapolis, where she is also a Professor with the Department of Educational Psychology. Her specialization is STEM program evaluation.
Dr. Lawrenz is a member of AEA...View more
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, USA
Stephen A. Campbell (M'83–F'07) was born in St. Paul, MN. He received the B.A. degree in physics from St. Thomas University, St. Paul, MN, in 1975, and the M.S. and Ph.D. degrees in physics from Northwestern University, Evanston, IL, in 1977 and 1981, respectively.
He worked as a Device Engineer, CMOS Process Development Manager, and Silicon Research Manager with Unisys, Eagan, MN, from 1981 to 1986. He then joined the Uni...Show More
Stephen A. Campbell (M'83–F'07) was born in St. Paul, MN. He received the B.A. degree in physics from St. Thomas University, St. Paul, MN, in 1975, and the M.S. and Ph.D. degrees in physics from Northwestern University, Evanston, IL, in 1977 and 1981, respectively.
He worked as a Device Engineer, CMOS Process Development Manager, and Silicon Research Manager with Unisys, Eagan, MN, from 1981 to 1986. He then joined the Uni...View more
Contents Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, USA
Maryam Jalali received the M.S. degree in electrical engineering from the University of Minnesota, Minneapolis, in 2009, and is currently pursuing the Ph.D. degree in electrical and computer engineering from the same institution.
Her current research interests include study of deposition of carbon nanotubes and fabrication of resistively heated emitter pixels.
Maryam Jalali received the M.S. degree in electrical engineering from the University of Minnesota, Minneapolis, in 2009, and is currently pursuing the Ph.D. degree in electrical and computer engineering from the same institution.
Her current research interests include study of deposition of carbon nanotubes and fabrication of resistively heated emitter pixels.View more
Nanofabrication Center, University of Minnesota, Minneapolis, MN, USA
James J. Marti received the Bachelor's degree in physics and biology from Macalester College, St. Paul, MN, in 1980, the M.S. degree in atmospheric science from the University of Arizona, Tucson, in 1988, and the Ph.D. degree in physics from the University of Minnesota, Minneapolis, in 1993.
He is currently the External Relations Coordinator with the Nanofabrication Center, University of Minnesota, where he develops and presents educational programs on lithography and microelectronics for visiting school groups and the general public. He also teaches college-level courses on electronics, nanotechnology, nanomaterials, and computer simulations of nanoscale phenomena. Prior to joining the University of Minnesota, he developed and managed physical science education programs at the Science Museum of Minnesota, St. Paul. His research work, performed at the US Naval Research Laboratory and several private companies, has focused on the physics and chemistry of micron- and nanometer-scale particles, particle systems, and related materials.
Dr. Marti is a member of the American Physical Society, the Particle Society of Minnesota, and the American Geophysical Union, and is a former editor of Eos, an international newspaper of earth and space science.
James J. Marti received the Bachelor's degree in physics and biology from Macalester College, St. Paul, MN, in 1980, the M.S. degree in atmospheric science from the University of Arizona, Tucson, in 1988, and the Ph.D. degree in physics from the University of Minnesota, Minneapolis, in 1993.
He is currently the External Relations Coordinator with the Nanofabrication Center, University of Minnesota, where he develops and presents educational programs on lithography and microelectronics for visiting school groups and the general public. He also teaches college-level courses on electronics, nanotechnology, nanomaterials, and computer simulations of nanoscale phenomena. Prior to joining the University of Minnesota, he developed and managed physical science education programs at the Science Museum of Minnesota, St. Paul. His research work, performed at the US Naval Research Laboratory and several private companies, has focused on the physics and chemistry of micron- and nanometer-scale particles, particle systems, and related materials.
Dr. Marti is a member of the American Physical Society, the Particle Society of Minnesota, and the American Geophysical Union, and is a former editor of Eos, an international newspaper of earth and space science.View more
Department of Educational Psychology, University of Minnesota, Minneapolis, MN, USA
Allison L. Kirchhoff received the Ph.D. degree in curriculum and instruction from the University of Minnesota, Minneapolis, in 2009.
She is currently an independent Evaluation Consultant in Minneapolis, MN.
Dr. Kirchhoff is a member of the School Science and Mathematics Association and the American Evaluation Association.
Allison L. Kirchhoff received the Ph.D. degree in curriculum and instruction from the University of Minnesota, Minneapolis, in 2009.
She is currently an independent Evaluation Consultant in Minneapolis, MN.
Dr. Kirchhoff is a member of the School Science and Mathematics Association and the American Evaluation Association.View more
Department of Educational Psychology, University of Minnesota, Minneapolis, MN, USA
Frances Lawrenz received the Dr.Phil. degree with a major in education and minors in chemistry and mathematics from the University of Minnesota, Minneapolis, in 1974.
She is currently the Associate Vice President for Research with the University of Minnesota, Minneapolis, where she is also a Professor with the Department of Educational Psychology. Her specialization is STEM program evaluation.
Dr. Lawrenz is a member of AEA, AERA, NARST, NSTA, ASTE, SMM, EES, and ESERA. She has received the Wallace Professorship of Teaching and Learning and the University award for Distinguished Contributions to Graduate Education.
Frances Lawrenz received the Dr.Phil. degree with a major in education and minors in chemistry and mathematics from the University of Minnesota, Minneapolis, in 1974.
She is currently the Associate Vice President for Research with the University of Minnesota, Minneapolis, where she is also a Professor with the Department of Educational Psychology. Her specialization is STEM program evaluation.
Dr. Lawrenz is a member of AEA, AERA, NARST, NSTA, ASTE, SMM, EES, and ESERA. She has received the Wallace Professorship of Teaching and Learning and the University award for Distinguished Contributions to Graduate Education.View more
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, USA
Stephen A. Campbell (M'83–F'07) was born in St. Paul, MN. He received the B.A. degree in physics from St. Thomas University, St. Paul, MN, in 1975, and the M.S. and Ph.D. degrees in physics from Northwestern University, Evanston, IL, in 1977 and 1981, respectively.
He worked as a Device Engineer, CMOS Process Development Manager, and Silicon Research Manager with Unisys, Eagan, MN, from 1981 to 1986. He then joined the University of Minnesota, Minneapolis. He is on the faculty of the Department of Electrical and Computer Engineering and is the Director of the NanoFabrication Center (http://www.nfc.umn.edu). He holds the Sanford P. and Lenore Edgerton Bordeau Chair in Electrical and Computer Engineering and is a Distinguished Professor with the university's College of Science and Engineering. He has nearly 200 publications. His textbook, Fabrication Engineering at the Micro- and Nanoscale (Oxford Univ. Press, 1996, 2001, 2006, 2013), has been used in over 80 US schools as well as schools in Europe and Asia and has been translated into several languages. He has worked in the area of semiconductor process technology, where his work ultimately led to fundamental changes in the way that CMOS transistors are manufactured. More recently, he has worked on carbon-based nano electromechanical devices (NEMS) and thin-film solar cells.
Stephen A. Campbell (M'83–F'07) was born in St. Paul, MN. He received the B.A. degree in physics from St. Thomas University, St. Paul, MN, in 1975, and the M.S. and Ph.D. degrees in physics from Northwestern University, Evanston, IL, in 1977 and 1981, respectively.
He worked as a Device Engineer, CMOS Process Development Manager, and Silicon Research Manager with Unisys, Eagan, MN, from 1981 to 1986. He then joined the University of Minnesota, Minneapolis. He is on the faculty of the Department of Electrical and Computer Engineering and is the Director of the NanoFabrication Center (http://www.nfc.umn.edu). He holds the Sanford P. and Lenore Edgerton Bordeau Chair in Electrical and Computer Engineering and is a Distinguished Professor with the university's College of Science and Engineering. He has nearly 200 publications. His textbook, Fabrication Engineering at the Micro- and Nanoscale (Oxford Univ. Press, 1996, 2001, 2006, 2013), has been used in over 80 US schools as well as schools in Europe and Asia and has been translated into several languages. He has worked in the area of semiconductor process technology, where his work ultimately led to fundamental changes in the way that CMOS transistors are manufactured. More recently, he has worked on carbon-based nano electromechanical devices (NEMS) and thin-film solar cells.View more
