A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts | IEEE Journals & Magazine | IEEE Xplore

A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts


Abstract:

A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics t...Show More

Abstract:

A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools.
Published in: IEEE Transactions on Education ( Volume: 55, Issue: 4, November 2012)
Page(s): 517 - 524
Date of Publication: 16 April 2012

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