Abstract:
A laboratory course on the theory, fabrication, and characterization of microelectromechanical systems (MEMS) devices for a multidisciplinary audience of graduate student...Show MoreMetadata
Abstract:
A laboratory course on the theory, fabrication, and characterization of microelectromechanical systems (MEMS) devices for a multidisciplinary audience of graduate students at the University of New Mexico, Albuquerque, has been developed. Hands-on experience in the cleanroom has attracted graduate students from across the university's engineering and science campuses, including students from the Nano-Science and Micro Systems program, itself an interdisciplinary program. This course has been offered yearly for the last four years (since 2007) at the University of New Mexico. In one project from the class, a MEMS actuator is fabricated. This paper details the theory, fabrication steps, and characterization of a silicon-on-insulator (SOI) comb drive actuator that relies on fixed-fixed beams for its restoring force. Discussions include force generation by comb drives and a linear and nonlinear description of the restoring force applied by the fixed-fixed beams. Course assessment data is given from 79 students from three semesters, based on which the effectiveness of the laboratory project is evaluated.
Published in: IEEE Transactions on Education ( Volume: 55, Issue: 1, February 2012)
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- IEEE Keywords
- Index Terms
- Silicon-on-insulator ,
- Interdisciplinary Program ,
- Number Of Students ,
- Fabrication Process ,
- Compressive Stress ,
- Suggestions For Improvement ,
- Residual Stress ,
- Strain Gauges ,
- Crystal Orientation ,
- Teaching Assistants ,
- Safety Protocols ,
- Set Of Scales ,
- Compound Annual Growth Rate ,
- Device Layer ,
- Laboratory Session ,
- Ultraviolet Lamp ,
- Probe Station ,
- Pattern Transfer ,
- Mask Aligner ,
- Laboratory Manual ,
- Bosch Process ,
- Core Courses ,
- Stiffness ,
- Tensile ,
- Compressive Residual Stress ,
- Student Feedback ,
- Average Class Size ,
- Piezoelectric ,
- Fabrication Procedure
- Author Keywords
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Silicon-on-insulator ,
- Interdisciplinary Program ,
- Number Of Students ,
- Fabrication Process ,
- Compressive Stress ,
- Suggestions For Improvement ,
- Residual Stress ,
- Strain Gauges ,
- Crystal Orientation ,
- Teaching Assistants ,
- Safety Protocols ,
- Set Of Scales ,
- Compound Annual Growth Rate ,
- Device Layer ,
- Laboratory Session ,
- Ultraviolet Lamp ,
- Probe Station ,
- Pattern Transfer ,
- Mask Aligner ,
- Laboratory Manual ,
- Bosch Process ,
- Core Courses ,
- Stiffness ,
- Tensile ,
- Compressive Residual Stress ,
- Student Feedback ,
- Average Class Size ,
- Piezoelectric ,
- Fabrication Procedure
- Author Keywords