Abstract:
A laboratory course on the theory, fabrication, and characterization of microelectromechanical systems (MEMS) devices for a multidisciplinary audience of graduate student...Show MoreMetadata
Abstract:
A laboratory course on the theory, fabrication, and characterization of microelectromechanical systems (MEMS) devices for a multidisciplinary audience of graduate students at the University of New Mexico, Albuquerque, has been developed. Hands-on experience in the cleanroom has attracted graduate students from across the university's engineering and science campuses, including students from the Nano-Science and Micro Systems program, itself an interdisciplinary program. This course has been offered yearly for the last four years (since 2007) at the University of New Mexico. In one project from the class, a MEMS actuator is fabricated. This paper details the theory, fabrication steps, and characterization of a silicon-on-insulator (SOI) comb drive actuator that relies on fixed-fixed beams for its restoring force. Discussions include force generation by comb drives and a linear and nonlinear description of the restoring force applied by the fixed-fixed beams. Course assessment data is given from 79 students from three semesters, based on which the effectiveness of the laboratory project is evaluated.
Published in: IEEE Transactions on Education ( Volume: 55, Issue: 1, February 2012)
Mechanical Engineering Department, University of New Mexico, Albuquerque, NM, USA
Khawar Abbas (S'10) received the B.S. degree in mechanical engineering from the National University of Science and Technology (NUST), Rawalpindi, Pakistan, in 2000, and the M.S. degree in mechanical engineering from the University of New Mexico, Albuquerque, in 2008, and is currently pursuing the Ph.D. degree in mechanical engineering at the University of New Mexico.
Between 2001 and 2006, he worked as a Design Engineer fo...Show More
Khawar Abbas (S'10) received the B.S. degree in mechanical engineering from the National University of Science and Technology (NUST), Rawalpindi, Pakistan, in 2000, and the M.S. degree in mechanical engineering from the University of New Mexico, Albuquerque, in 2008, and is currently pursuing the Ph.D. degree in mechanical engineering at the University of New Mexico.
Between 2001 and 2006, he worked as a Design Engineer fo...View more
Mechanical Engineering Department, University of New Mexico, Albuquerque, NM, USA
Zayd C. Leseman received the B.S., M.S., and Ph.D. degrees in mechanical and industrial engineering from the University of Illinois at Urbana–Champaign in 1997, 2000, and 2006, respectively.
After obtaining the M.S. degree, he started his own company, in which he designed, fabricated, and patented a novel inkjet printhead. Currently, he is an Assistant Professor of mechanical engineering with the University of New Mexico, ...Show More
Zayd C. Leseman received the B.S., M.S., and Ph.D. degrees in mechanical and industrial engineering from the University of Illinois at Urbana–Champaign in 1997, 2000, and 2006, respectively.
After obtaining the M.S. degree, he started his own company, in which he designed, fabricated, and patented a novel inkjet printhead. Currently, he is an Assistant Professor of mechanical engineering with the University of New Mexico, ...View more
Contents Mechanical Engineering Department, University of New Mexico, Albuquerque, NM, USA
Khawar Abbas (S'10) received the B.S. degree in mechanical engineering from the National University of Science and Technology (NUST), Rawalpindi, Pakistan, in 2000, and the M.S. degree in mechanical engineering from the University of New Mexico, Albuquerque, in 2008, and is currently pursuing the Ph.D. degree in mechanical engineering at the University of New Mexico.
Between 2001 and 2006, he worked as a Design Engineer for various engineering enterprises in Pakistan. During this time, he solved various mechanical design problems, developed design requirements, performed piece part design and coordinated fabrication, assembly, and qualification of hardware. In 2006, he left his employment to pursue higher education at the University of New Mexico. His doctoral research is focused on the investigation of physical and mechanical properties of nano/microscale materials. He is also interested in design and development of calibration and testing techniques for MEMS devices and actuators.
Mr. Abbas is a Member of the American Society of Mechanical Engineers and is a registered Professional Engineer in Pakistan.
Khawar Abbas (S'10) received the B.S. degree in mechanical engineering from the National University of Science and Technology (NUST), Rawalpindi, Pakistan, in 2000, and the M.S. degree in mechanical engineering from the University of New Mexico, Albuquerque, in 2008, and is currently pursuing the Ph.D. degree in mechanical engineering at the University of New Mexico.
Between 2001 and 2006, he worked as a Design Engineer for various engineering enterprises in Pakistan. During this time, he solved various mechanical design problems, developed design requirements, performed piece part design and coordinated fabrication, assembly, and qualification of hardware. In 2006, he left his employment to pursue higher education at the University of New Mexico. His doctoral research is focused on the investigation of physical and mechanical properties of nano/microscale materials. He is also interested in design and development of calibration and testing techniques for MEMS devices and actuators.
Mr. Abbas is a Member of the American Society of Mechanical Engineers and is a registered Professional Engineer in Pakistan.View more
Mechanical Engineering Department, University of New Mexico, Albuquerque, NM, USA
Zayd C. Leseman received the B.S., M.S., and Ph.D. degrees in mechanical and industrial engineering from the University of Illinois at Urbana–Champaign in 1997, 2000, and 2006, respectively.
After obtaining the M.S. degree, he started his own company, in which he designed, fabricated, and patented a novel inkjet printhead. Currently, he is an Assistant Professor of mechanical engineering with the University of New Mexico, Albuquerque. He currently holds four U.S. patents in the area of MEMS. His research is focused on the analysis, fabrication, and study of nanoscale material properties of MEMS/NEMS and photonic crystals. He is also involved in ultra-high vacuum studies of MEMS vibrations and improved etching techniques of Si using XeF2.
Dr. Leseman is a Member of the American Society of Mechanical Engineers, the Materials Research Society, the Society for Experimental Mechanics, and the American Vacuum Society. He is currently on the reviewing panel for several journals and serves on number of academic committees.
Zayd C. Leseman received the B.S., M.S., and Ph.D. degrees in mechanical and industrial engineering from the University of Illinois at Urbana–Champaign in 1997, 2000, and 2006, respectively.
After obtaining the M.S. degree, he started his own company, in which he designed, fabricated, and patented a novel inkjet printhead. Currently, he is an Assistant Professor of mechanical engineering with the University of New Mexico, Albuquerque. He currently holds four U.S. patents in the area of MEMS. His research is focused on the analysis, fabrication, and study of nanoscale material properties of MEMS/NEMS and photonic crystals. He is also involved in ultra-high vacuum studies of MEMS vibrations and improved etching techniques of Si using XeF2.
Dr. Leseman is a Member of the American Society of Mechanical Engineers, the Materials Research Society, the Society for Experimental Mechanics, and the American Vacuum Society. He is currently on the reviewing panel for several journals and serves on number of academic committees.View more
