Abstract:
The University of Waterloo, Waterloo, ON, Canada, is home to North America's first undergraduate program in nanotechnology. As part of the Nanotechnology Engineering degr...Show MoreMetadata
Abstract:
The University of Waterloo, Waterloo, ON, Canada, is home to North America's first undergraduate program in nanotechnology. As part of the Nanotechnology Engineering degree program, a scanning probe microscopy (SPM)-based laboratory has been developed for students in their fourth year. The one-term laboratory course “Nanoprobing and Lithography” is accompanied by a preceding one-term lecture course, “Nanoprobing and Lithography.” The lecture course lays the theoretical foundation for the concepts covered in the laboratory course. The students work in groups of two and obtain hands-on experience in biweekly 3-h laboratory sessions. The labs use a dedicated undergraduate SPM teaching facility consisting of five atomic force microscope stations. The laboratory course covers all common standard modes of operation, as well as force spectroscopy, electrostatic force microscopy, magnetic force microscopy, and scanning probe lithography by electrochemical oxidation and scratching/ploughing of resist. In light of the breadth of the nanotechnology engineering educational program in terms of synthesis and characterization of nanomaterials, the authors designed a dedicated SPM lab with a capacity of up to 130 students per term.
Published in: IEEE Transactions on Education ( Volume: 54, Issue: 3, August 2011)
University of Waterloo, Waterloo, ONT, Canada
Daniel Russo received the B.A.Sc. degree in nanotechnology engineering from the University of Waterloo, Waterloo, ON, Canada, in 2010.
He is currently with Polar Mobile, Toronto, ON, Canada.
Daniel Russo received the B.A.Sc. degree in nanotechnology engineering from the University of Waterloo, Waterloo, ON, Canada, in 2010.
He is currently with Polar Mobile, Toronto, ON, Canada.View more
University of Waterloo, Waterloo, ONT, Canada
Randal D. Fagan received the B.Sc. degree in science from the University of Waterloo, Waterloo, ON, Canada, in 1997.
He is currently a Lab Instructor with the Nanotechnology Engineering Program at the University of Waterloo.
Randal D. Fagan received the B.Sc. degree in science from the University of Waterloo, Waterloo, ON, Canada, in 1997.
He is currently a Lab Instructor with the Nanotechnology Engineering Program at the University of Waterloo.View more
Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ONT, Canada
Thorsten Hesjedal (S'96–A'97–SM'03) received the Ph.D. degree in physics from the Humboldt University, Berlin, Germany, in 1997.
He is currently an Associate Professor of electrical and computer engineering with the University of Waterloo, Waterloo, ON, Canada. He is involved with the development of the Nanotechnology Engineering Program and specializes in this context in materials characterization by electron microscopy, ...Show More
Thorsten Hesjedal (S'96–A'97–SM'03) received the Ph.D. degree in physics from the Humboldt University, Berlin, Germany, in 1997.
He is currently an Associate Professor of electrical and computer engineering with the University of Waterloo, Waterloo, ON, Canada. He is involved with the development of the Nanotechnology Engineering Program and specializes in this context in materials characterization by electron microscopy, ...View more
University of Waterloo, Waterloo, ONT, Canada
Daniel Russo received the B.A.Sc. degree in nanotechnology engineering from the University of Waterloo, Waterloo, ON, Canada, in 2010.
He is currently with Polar Mobile, Toronto, ON, Canada.
Daniel Russo received the B.A.Sc. degree in nanotechnology engineering from the University of Waterloo, Waterloo, ON, Canada, in 2010.
He is currently with Polar Mobile, Toronto, ON, Canada.View more
University of Waterloo, Waterloo, ONT, Canada
Randal D. Fagan received the B.Sc. degree in science from the University of Waterloo, Waterloo, ON, Canada, in 1997.
He is currently a Lab Instructor with the Nanotechnology Engineering Program at the University of Waterloo.
Randal D. Fagan received the B.Sc. degree in science from the University of Waterloo, Waterloo, ON, Canada, in 1997.
He is currently a Lab Instructor with the Nanotechnology Engineering Program at the University of Waterloo.View more
Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ONT, Canada
Thorsten Hesjedal (S'96–A'97–SM'03) received the Ph.D. degree in physics from the Humboldt University, Berlin, Germany, in 1997.
He is currently an Associate Professor of electrical and computer engineering with the University of Waterloo, Waterloo, ON, Canada. He is involved with the development of the Nanotechnology Engineering Program and specializes in this context in materials characterization by electron microscopy, X-ray diffraction, and spectroscopy techniques, as well as scanning probe microscopy.
Thorsten Hesjedal (S'96–A'97–SM'03) received the Ph.D. degree in physics from the Humboldt University, Berlin, Germany, in 1997.
He is currently an Associate Professor of electrical and computer engineering with the University of Waterloo, Waterloo, ON, Canada. He is involved with the development of the Nanotechnology Engineering Program and specializes in this context in materials characterization by electron microscopy, X-ray diffraction, and spectroscopy techniques, as well as scanning probe microscopy.View more